@prefix fmc: <http://data.loterre.fr/ark:/67375/FMC> .
@prefix skos: <http://www.w3.org/2004/02/skos/core#> .

fmc: a skos:ConceptScheme .
fmc:-LJL82CDG-L
  skos:hiddenLabel "fotolithografischen"@de ;
  skos:prefLabel "photolithography"@en, "Fotolithographie"@de, "fotolitografía"@es, "photolithographie"@fr ;
  skos:altLabel "optical lithography"@en, "lithographie optique"@fr, "photolithographic process"@en, "Photolithographie"@de, "litografía óptica"@es, "photomasquage"@fr, "masquage optique"@fr, "masquage photographique"@fr ;
  skos:inScheme fmc: ;
  skos:broader fmc:-TNMLXWSN-G ;
  a skos:Concept ;
  skos:narrower fmc:-FJ8KML81-G, fmc:-KNZ9H803-W .

fmc:-KNZ9H803-W
  skos:prefLabel "UV-lithography"@en, "UV-Lithographie"@de, "lithographie UV"@fr, "litografía UV"@es ;
  a skos:Concept ;
  skos:broader fmc:-LJL82CDG-L .

fmc:-FJ8KML81-G
  skos:prefLabel "lithographie à rayons X"@fr, "Röntgen-Lithographie"@de, "litografía de rayos X"@es, "X-ray lithography"@en ;
  a skos:Concept ;
  skos:broader fmc:-LJL82CDG-L .

fmc:-TNMLXWSN-G
  skos:prefLabel "Lithografie"@de, "litografía"@es, "lithography"@en, "lithographie"@fr ;
  a skos:Concept ;
  skos:narrower fmc:-LJL82CDG-L .