Concept information
Preferred term
metallorganic chemical vapor deposition
Synonym(s)
- metalorganic vapour-phase epitaxy
- MOCVD
- MOPVE
- OMCVD
- OMPVE
- organnometallic vapour-phase epitaxy
- organometallic chemical vapor deposition
In other languages
-
French
-
dépôt chimique en phase vapeur aux composés organométalliques
-
EPVOM
-
MOCVD
URI
http://data.loterre.fr/ark:/67375/QJP-XMTFB1QX-W
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