Concept information
Preferred term
méthode PECVD
Synonym(s)
- dépôt chimique en phase vapeur assisté par plasma
Belongs to group
In other languages
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English
-
plasma enhanced chemical vapor deposition
-
Spanish
-
deposición química en fase vapor por plasma
URI
http://data.loterre.fr/ark:/67375/NHT-GW8H61NC-V
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