Concept information
Preferred term
PECVD
Synonym(s)
- plasma enhanced chemical vapor deposition
Belongs to group
In other languages
-
French
-
dépôt chimique en phase vapeur assisté par plasma
-
Spanish
-
deposición química en fase vapor por plasma
URI
http://data.loterre.fr/ark:/67375/NHT-GW8H61NC-V
{{label}}
{{#each values }} {{! loop through ConceptPropertyValue objects }}
{{#if prefLabel }}
{{/if}}
{{/each}}
{{#if notation }}{{ notation }} {{/if}}{{ prefLabel }}
{{#ifDifferentLabelLang lang }} ({{ lang }}){{/ifDifferentLabelLang}}
{{#if vocabName }}
{{ vocabName }}
{{/if}}