... > chemical entity > molecular entity > polyatomic entity > heteroatomic molecular entity > coordination entity > main-group coordination entity > phosphorus coordination entity > phosphorus halide > phosphorus trifluoride

... > chemical entity > molecular entity > main group molecular entity > main-group coordination entity > phosphorus coordination entity > phosphorus halide > phosphorus trifluoride

... > chemical entity > molecular entity > main group molecular entity > p-block molecular entity > pnictogen molecular entity > phosphorus molecular entity > phosphorus coordination entity > phosphorus halide > phosphorus trifluoride

... > chemical entity > molecular entity > main group molecular entity > p-block molecular entity > pnictogen molecular entity > pnictogen halide > phosphorus halide > phosphorus trifluoride