Concept information
Preferred term
épitaxie en phase vapeur
Synonym(s)
- EPV
- VPE
In other languages
-
English
-
Vapor phase epitaxial growth
-
Vapor phase epitaxy
-
Vapour phase epitaxial growth
-
VPE method
-
German
-
Spanish
URI
http://data.loterre.fr/ark:/67375/FMC-VT86WNPB-6
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