Concept information
Preferred term
dépôt chimique en phase vapeur
Synonym(s)
- CVD
- méthode CVD
In other languages
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English
-
chemical vapor deposition
-
chemical vapour deposition
-
CVD method
-
MCVD method
-
German
-
CVD
-
Spanish
-
CVD
URI
http://data.loterre.fr/ark:/67375/FMC-VMV2VQS0-B
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