Concept information
Preferred term
electron beam lithography
Broader concept
Synonym(s)
- e-beam lithography
In other languages
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French
-
lithographie électronique
-
lithographie par faisceau électronique
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German
-
Spanish
-
litografía por e-beam
URI
http://data.loterre.fr/ark:/67375/FMC-VL5NX6FZ-V
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