Concept information
Preferred term
photolithographie
Broader concept
Narrower concepts
Synonym(s)
- lithographie optique
- masquage optique
- masquage photographique
- photomasquage
In other languages
-
English
-
optical lithography
-
photolithographic process
-
German
-
Photolithographie
-
Spanish
-
litografía óptica
URI
http://data.loterre.fr/ark:/67375/FMC-LJL82CDG-L
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