Concept information
Preferred term
dispositif microélectromécanique
Synonym(s)
- système microélectromécanique
In other languages
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English
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MEMS
-
microelectromechanical system
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German
-
mikroelektromechanisches System
-
Spanish
URI
http://data.loterre.fr/ark:/67375/FMC-DCB0SC8G-X
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