Concept information
Preferred term
mikroelektromechanische Vorrichtung
Synonym(s)
- mikroelektromechanisches System
In other languages
-
English
-
MEMS
-
microelectromechanical system
-
French
-
système microélectromécanique
-
Spanish
URI
http://data.loterre.fr/ark:/67375/FMC-DCB0SC8G-X
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